Producción y caracterización de bicapas de DLC/ZrxOy usando técnicas de sputtering y CVD asistido por plasma
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Autores
Esquivel Puentes, Helber Antonio
Director
Olaya Flórez, Jhon Jairo (Thesis advisor)
Tipo de contenido
Trabajo de grado - Maestría
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EspañolFecha de publicación
2017-09-08
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Este trabajo describe la síntesis de una bicapa compuesta de diamante como carbón (DLC) con una intercapa de Zirconia (ZrO2), la cual fue sintetizada por medio de un sistema deposición química en fase vapor por microondas (MPCVD) para el DLC y Sputtering por R.F. para la intercapa de ZrO2, el deposito fue hecho sobre substratos de acero inoxidable AISI 316 L, aleación de titanio Ti6Al4V y silicio (400), usando como una mezcla de metano e hidrogeno (CH4 + H2) para la capa de DLC, la intercapa de ZrO2 se realizó usando un blanco de ZrO2 estabilizado con itrio al 8% (YZS). La adición de silicio durante el depósito de la intercapa de ZrO2 resulta en una contribución para lograr crecer y adherir la capa de DLC. Las películas fueron caracterizadas en su composición química usando EDS, la estructura a partir de espectroscopia Raman para el DLC y difracción de rayos X (XRD) para la intercapa de ZrO2, la morfología fue analizada por medio de AFM y FE-SEM. Durante el depósito de la película de DLC vía MPCVD los efectos de la variación del voltaje BIAS (-200 V, -250 V, -300 V) tanto en la estructura química como en las propiedades de resistencia al desgaste y la corrosión fueron estudiados. Se analizó el comportamiento de la bicapa en diferentes condiciones de carga y velocidad durante el ensayo de desgaste, para evaluar la transición de mecanismos y la tasa de desgaste en diferentes condiciones. El volumen perdido y el COF en función del voltaje de autopolarización aplicado al momento del depósito de la capa de DLC. El comportamiento frente a la corrosión se determinó por medio de la técnica de polarización potenciodinámica.
Abstract. This work describes the synthesis of a composite bilayer of diamond like carbon (DLC) with a Zirconia interlayer (ZrO2), which was synthesized by means of a microwave chemical vapor deposition system (MPCVD) for DLC and Sputtering by R.F. for the ZrO2 interlayer, the deposit was made on substrates of AISI 316 L stainless steel, titanium alloy Ti6Al4V and silicon (400), using as a mixture of methane and hydrogen (CH4 + H2) for the layer of DLC, the interlayer of ZrO2 was performed using an 8% yttrium stabilized ZrO2 target (YZS), which was further characterized in its chemical composition using EDS, the chemical structure was known by means of Raman spectroscopy for DLC and X-ray diffraction (XRD) for the ZrO2 interlayer, the morphology was analyzed by AFM and FE-SEM. During the deposition of the DLC film via MPCVD the effects of the variation of the BIAS voltage (-200 V, -250 V, -300 V) in both the chemical structure as well as the properties of wear resistance and corrosion was studied. The behavior of the bilayer at different normal loading and speed conditions at the time of the wear test was analyzed to observe the transition of wear mechanisms to the variation of conditions as well as the rate of wear, volume lost and COF as a function of the BIAS voltage applied at the time of deposition of the DLC layer, the corrosion behavior was evaluated by means of the potentiodynamic polarization technique. The addition of silicon during the deposition of the ZrO2 interlayer results in a contribution to achieve growth and adhesion of the DLC layer.
Abstract. This work describes the synthesis of a composite bilayer of diamond like carbon (DLC) with a Zirconia interlayer (ZrO2), which was synthesized by means of a microwave chemical vapor deposition system (MPCVD) for DLC and Sputtering by R.F. for the ZrO2 interlayer, the deposit was made on substrates of AISI 316 L stainless steel, titanium alloy Ti6Al4V and silicon (400), using as a mixture of methane and hydrogen (CH4 + H2) for the layer of DLC, the interlayer of ZrO2 was performed using an 8% yttrium stabilized ZrO2 target (YZS), which was further characterized in its chemical composition using EDS, the chemical structure was known by means of Raman spectroscopy for DLC and X-ray diffraction (XRD) for the ZrO2 interlayer, the morphology was analyzed by AFM and FE-SEM. During the deposition of the DLC film via MPCVD the effects of the variation of the BIAS voltage (-200 V, -250 V, -300 V) in both the chemical structure as well as the properties of wear resistance and corrosion was studied. The behavior of the bilayer at different normal loading and speed conditions at the time of the wear test was analyzed to observe the transition of wear mechanisms to the variation of conditions as well as the rate of wear, volume lost and COF as a function of the BIAS voltage applied at the time of deposition of the DLC layer, the corrosion behavior was evaluated by means of the potentiodynamic polarization technique. The addition of silicon during the deposition of the ZrO2 interlayer results in a contribution to achieve growth and adhesion of the DLC layer.