Recubrimientos nanoestructurados de Ti-Zr-Si-N producidos por la técnica de co-sputtering reactivo

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dc.contributor.advisorOlaya Flórez, Jhon Jairo
dc.contributor.advisorGarzón Ospina, Carlos Mario
dc.contributor.authorMejía Villagrán, Claudia Patricia
dc.contributor.researchgroupAnálisis de Falla Integridad de Superficies (AFIS)
dc.date.accessioned2025-11-18T19:42:20Z
dc.date.available2025-11-18T19:42:20Z
dc.date.issued2025
dc.descriptionilustraciones a color, diagramas, fotografías, tablasspa
dc.description.abstractEl presente trabajo tuvo como objetivos principales sintetizar y caracterizar recubrimientos nanoestructurados de Ti-Zr-Si-N, obtenidos mediante la técnica de co-sputtering reactivo, con el fin de evaluar su desempeño estructural, mecánico, tribológico y de resistencia a la corrosión. Esta investigación se enmarca en la búsqueda de recubrimientos avanzados para aplicaciones industriales, donde se requieren propiedades superiores de dureza y resistencia a la corrosión. La metodología empleada consistió en la deposición de recubrimientos sobre sustratos de acero inoxidable, silicio y vidrio, utilizando configuraciones de co-sputtering DC/DC pulsada, RF/RF y DC/RF, variando las densidades de potencia y la composición de los blancos. Las muestras obtenidas fueron caracterizadas mediante técnicas como difracción de rayos X (XRD), espectroscopía de fotoelectrones (XPS), microscopía electrónica (SEM, TEM), nanoindentación, pruebas tribológicas y espectroscopía de impedancia electroquímica (EIS). Los resultados más destacados indican que la incorporación controlada de silicio promueve la formación de estructuras tipo nanocompuesto, formadas por granos cristalinos de nitruros metálicos rodeados por una matriz amorfa rica en Si₃N₄, lo que mejora significativamente la dureza (hasta 23.5 GPa) y la resistencia a la corrosión. La muestra óptima presentó una combinación balanceada entre fases amorfas y cristalinas, asociadas a una menor densidad de defectos. Se concluye que los recubrimientos multicomponente Ti-Zr-Si-N presentan un alto potencial para aplicaciones tecnológicas donde se requiere simultáneamente resistencia mecánica y protección superficial frente a medios agresivos (Texto tomado de la fuente).spa
dc.description.abstractThis research aimed to synthesize and characterize nanostructured Ti-Zr-Si-N coatings produced by reactive co-sputtering, in order to evaluate their structural, mechanical, tribological, and corrosión resistant performance. The study contributes to the development of advanced coatings for industrial applications requiring superior hardness and corrosion resistance. The methodology involved the deposition of coatings onto stainless steel, silicon, and glass substrates using DC/DC pulsed, RF/RF, and DC/RF co-sputtering configurations, with variations in power densities and target compositions. The resulting samples were characterized using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), electron microscopy (SEM, TEM), nanoindentation, tribological tests, and electrochemical impedance spectroscopy (EIS). The most relevant results show that controlled incorporation of silicon promotes the formation of nanocomposite structures composed of crystalline metallic nitride grains embedded in an amorphous Si₃N₄ matrix, significantly enhancing both hardness (up to 23.5 GPa) and corrosion resistance. The optimal coating exhibited a balanced combination of amorphous and crystalline phases, associated with a lower density of defects. It is concluded that multicomponent Ti-Zr-Si-N coatings possess high potential for technological applications requiring both mechanical strength and surface protection in aggressive environments.eng
dc.description.degreelevelDoctorado
dc.description.degreenameDoctora en Ingeniería - Ciencia y Tecnología de Materiales
dc.description.methodsLa metodología empleada consistió en la deposición de recubrimientos sobre sustratos de acero inoxidable, silicio y vidrio, utilizando configuraciones de co-sputtering DC/DC pulsada, RF/RF y DC/RF, variando las densidades de potencia y la composición de los blancos. Las muestras obtenidas fueron caracterizadas mediante técnicas como difracción de rayos X (XRD), espectroscopía de fotoelectrones (XPS), microscopía electrónica (SEM, TEM), nanoindentación, pruebas tribológicas y espectroscopía de impedancia electroquímica (EIS).
dc.description.researchareaIngeIngeniería de Superficies y Corrosiónniería de Superficies y Corrosión
dc.format.extent98 páginas
dc.format.mimetypeapplication/pdf
dc.identifier.instnameUniversidad Nacional de Colombiaspa
dc.identifier.reponameRepositorio Institucional Universidad Nacional de Colombiaspa
dc.identifier.repourlhttps://repositorio.unal.edu.co/spa
dc.identifier.urihttps://repositorio.unal.edu.co/handle/unal/89133
dc.language.isospa
dc.publisherUniversidad Nacional de Colombia
dc.publisher.branchUniversidad Nacional de Colombia - Sede Bogotá
dc.publisher.facultyFacultad de Ingeniería
dc.publisher.placeBogotá, Colombia
dc.publisher.programBogotá - Ingeniería - Doctorado en Ingeniería - Ciencia y Tecnología de Materiales
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dc.rights.accessrightsinfo:eu-repo/semantics/openAccess
dc.rights.licenseAtribución-NoComercial 4.0 Internacional
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/
dc.subject.ddc620 - Ingeniería y operaciones afines
dc.subject.ddc530 - Física::539 - Física moderna
dc.subject.lembMATERIALES DE NANOESTRUCTURASspa
dc.subject.lembNanostructure materialseng
dc.subject.lembNANOTECNOLOGIAspa
dc.subject.lembNanotechnologyeng
dc.subject.lembNANOESTRUCTURASspa
dc.subject.lembNanostructureseng
dc.subject.lembPULVERIZACION CATODICA (METALIZACION)spa
dc.subject.lembCathode sputtering (plating process)eng
dc.subject.lembPULVERIZACION CATODICA (FISICA)spa
dc.subject.lembSputtering (Physics)eng
dc.subject.lembCORROSION DEL ACEROspa
dc.subject.lembSteel - Corrosioneng
dc.subject.proposalTi-Zr-Si-Nspa
dc.subject.proposalRecubrimientos nanoestructuradosspa
dc.subject.proposalCorrosiónspa
dc.subject.proposalDesgastespa
dc.subject.proposalTribologíaspa
dc.subject.proposalNanostructured coatingseng
dc.subject.proposalCorrosioneng
dc.subject.proposalWeareng
dc.subject.proposalTribologyeng
dc.titleRecubrimientos nanoestructurados de Ti-Zr-Si-N producidos por la técnica de co-sputtering reactivospa
dc.title.translatedNanostructured Ti-Zr-Si-N coatings produced by reactive cosputtering techniqueeng
dc.typeTrabajo de grado - Doctorado
dc.type.coarhttp://purl.org/coar/resource_type/c_db06
dc.type.coarversionhttp://purl.org/coar/version/c_ab4af688f83e57aa
dc.type.contentText
dc.type.driverinfo:eu-repo/semantics/doctoralThesis
dc.type.redcolhttp://purl.org/redcol/resource_type/TD
dc.type.versioninfo:eu-repo/semantics/acceptedVersion
dcterms.audience.professionaldevelopmentPúblico general
dcterms.audience.professionaldevelopmentEstudiantes
dcterms.audience.professionaldevelopmentInvestigadores
dcterms.audience.professionaldevelopmentMaestros
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