Recubrimientos funcionales de (Zr, Ag, Si) N y (Zr, Cu, Si) N producidos por la técnica de co­sputtering magnetrón reactivo

dc.contributor.advisorAlfonso Orjuela, José Edgarspa
dc.contributor.advisorOlaya Florez, Jhon Jairospa
dc.contributor.authorVanegas Parra, Henry Samirspa
dc.contributor.researchgroupGrupo de Ciencia de Materiales y Superficiesspa
dc.date.accessioned2020-08-29T07:28:24Zspa
dc.date.available2020-08-29T07:28:24Zspa
dc.date.issued2020-01-20spa
dc.description.abstractIn this Ph.D. thesis work, zirconium nitride with silicon (ZrN-Si) coatings doped with silver (ZrSiN-Ag) and copper (ZrSiN-Cu) were deposited, using the sputtering technique on glass, silicon and 316L stainless steel substrates. The main objective of the study was to research the effect that silver (Ag) or copper (Cu) have on the chemical composition, microstructure and functional properties, such as mechanical, optical and electrical properties of the deposited coatings. The chemical characterization of the coatings was performed by means of Energy-Dispersive X-ray (EDX) spectroscopy and X-ray Photoelectron spectrometry (XPS) techniques. The characterization of the microstructure of the coatings was carried out by means of X-Ray Diffraction (XRD) and Transmission Electron Microscopy (MET) techniques. The morphology was studied by means of the Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). To assess the mechanical properties of the coatings, nano hardness measurements were carried out. The optical response was evaluated by means of transmittance and reflectance measurements, using the ultraviolet-visible spectrophotometry technique (UV-VIS). Finally, electrical properties were evaluated by voltage vs. current measurements using the Van der Pauw method. The most relevant results of this work can be summarized in four points. i) ZrSiN-Ag and ZrSiN-Cu coatings have a microstructure with manometric dimensions (crystallite sizes smaller than 15 nm). ii) The addition of silicon to the ZrN coating had no nano-compound microstructure. iii) The addition of silver or copper to the ZrSiN structure modified both the microstructure and the morphology of these coatings. Finally, iv) the addition of silver or copper formed no compounds with zirconium (Zr), nitrogen (N) or silicon (Si) atoms, which indicates that these elements were immiscible and that most likely they have been lodged in the grain edges of the ZrSiN system. The characterization of the functional properties studied allowed us to establish that the nanohardness of the coatings had no improvement with the addition of silicon, silver or copper. The coatings with Ag added may have a possible application as dichroic filters, which block ultraviolet radiation, but allow infrared radiation to pass through. Cu coatings showed a high reflection (70%) in the infrared region, which decreases in the ultraviolet region. These last coatings were bright golden, with possible applications as decorative coating. Finally, the electrical measurements showed that the addition of silver and / or copper to the ZrSiN system produced a decrease in its electrical resistivity.spa
dc.description.abstractEn este trabajo de tesis de doctorado, se depositaron por primera vez recubrimientos de nitruro de zirconio con silicio (ZrN-Si) dopados con plata (ZrSiN-Ag) y cobre (ZrSiN-Cu), mediante la técnica de pulverización catódica sobre sustratos de vidrio, silicio y acero inoxidable 316L. El objetivo fundamental del estudio se centró en investigar el efecto que tienen la plata (Ag) o el cobre (Cu) sobre la composición química, la microestructura y las propiedades funcionales tales como las mecánicas, ópticas y eléctricas del material depositado. La caracterización química de los recubrimientos se realizó por medio de las técnicas de espectroscopia de rayos X dispersados (EDX) y de espectrometría de fotoelectrones emitidos por rayos X (XPS). La caracterización de la microestructura de los recubrimientos se realizó por medio de las técnicas de difracción de rayos X (DRX) y microscopia electrónica de transmisión (MET). La morfología fue estudiada por medio del microscopio electrónico de barrido (MEB) y microscopio de fuerza atómica (MFA). Para evaluar las propiedades mecánicas de los recubrimientos, se realizaron medidas de nanodureza. La respuesta óptica se evaluó mediante medidas de transmitancia y reflectancia, por medio de la técnica de espectrofotometría ultravioleta - visible (UV-VIS). Finalmente, las propiedades eléctricas se evaluaron mediante medidas de voltaje vs. corriente usando el método de Van der Pauw. Los resultados más relevantes de este trabajo se pueden resumir en cuatro. i) Los recubrimientos de ZrSiN-Ag y ZrSiN-Cu tienen una microestructura con dimensiones nanométricas (tamaños de cristalitos menores a 15 nm). ii) La adición de silicio al recubrimiento de ZrN no tiene microestructura de tipo nano compuesto. iii) La adición de plata o cobre a la estructura ZrSiN modificó tanto la microestructura como la morfología de estos recubrimientos. Finalmente, iv) la adición de plata o cobre no formó compuestos con átomos de zirconio (Zr), nitrógeno (N) o silicio (Si), lo que indica que estos elementos fueron inmiscibles y que lo más probable es que se hayan alojado en los bordes de grano del sistema ZrSiN. La caracterización de las propiedades funcionales investigadas permitió establecer que la nanodureza de los recubrimientos no mejoró con la adición de silicio, plata o cobre. Los recubrimientos a los que se les adiciono Ag pueden tener una posible aplicación como filtros dicroicos, los cuales bloquean la radiación ultravioleta, pero permiten el paso de la radiación infrarroja. Los recubrimientos con Cu mostraron tener una alta reflexión (70 %) en la región infrarroja, la cual disminuye en la región ultravioleta. Estos últimos recubrimientos fueron de color dorado brillante, con posibles aplicaciones como recubrimiento decorativo. Finalmente, las medidas eléctricas mostraron que la adición de plata y/o cobre al sistema ZrSiN produce una disminución en su resistividad eléctrica.spa
dc.description.additionalLínea de Investigación: Crecimiento y Caracterización de Recubrimientosspa
dc.description.degreelevelDoctoradospa
dc.description.sponsorshipUniversidad Nacional de Colombia y Colciencias.spa
dc.format.extent174spa
dc.format.mimetypeapplication/pdfspa
dc.identifier.urihttps://repositorio.unal.edu.co/handle/unal/78336
dc.language.isospaspa
dc.publisher.branchUniversidad Nacional de Colombia - Sede Bogotáspa
dc.publisher.programBogotá - Ingeniería - Doctorado en Ingeniería - Ciencia y Tecnología de Materialesspa
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dc.rightsDerechos reservados - Universidad Nacional de Colombiaspa
dc.rights.accessrightsinfo:eu-repo/semantics/openAccessspa
dc.rights.licenseAtribución-SinDerivadas 4.0 Internacionalspa
dc.rights.spaAcceso abiertospa
dc.rights.urihttp://creativecommons.org/licenses/by-nd/4.0/spa
dc.subject.ddc570 - Biologíaspa
dc.subject.ddc620 - Ingeniería y operaciones afinesspa
dc.subject.ddc522 - Técnicas, procedimientos, aparatos, equipos, materialesspa
dc.subject.proposalsputteringeng
dc.subject.proposalsputteringspa
dc.subject.proposalZrNspa
dc.subject.proposalZrNeng
dc.subject.proposalZrSiN-Cuspa
dc.subject.proposalZrSiNAgeng
dc.subject.proposalMEBspa
dc.subject.proposalZrSiNCueng
dc.subject.proposalcoatingseng
dc.subject.proposalEDXspa
dc.subject.proposalrecubrimientosspa
dc.subject.proposalXRDeng
dc.subject.proposalTEMeng
dc.subject.proposalZrN-Sispa
dc.subject.proposalMEBeng
dc.subject.proposalZrSiN-Agspa
dc.subject.proposalDRXspa
dc.subject.proposalEDSeng
dc.subject.proposalMETspa
dc.titleRecubrimientos funcionales de (Zr, Ag, Si) N y (Zr, Cu, Si) N producidos por la técnica de co­sputtering magnetrón reactivospa
dc.typeTrabajo de grado - Doctoradospa
dc.type.coarhttp://purl.org/coar/resource_type/c_db06spa
dc.type.coarversionhttp://purl.org/coar/version/c_ab4af688f83e57aaspa
dc.type.contentTextspa
dc.type.driverinfo:eu-repo/semantics/doctoralThesisspa
dc.type.versioninfo:eu-repo/semantics/acceptedVersionspa
oaire.accessrightshttp://purl.org/coar/access_right/c_abf2spa

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