Recubrimientos nanoestructurados de Ti-W-Si-N depositados mediante la técnica de co-sputtering magnetrón reactivo

dc.contributor.advisorOlaya Flórez, John Jairospa
dc.contributor.advisorAperador Chaparro, Willianspa
dc.contributor.authorMacías Ramírez, Hugo Alejandrospa
dc.contributor.researchgroupGRUPO DE INVESTIGACIÓN AFIS (ANÁLISIS DE FALLAS, INTEGRIDAD Y SUPERFICIES)spa
dc.date.accessioned2020-12-16T22:38:34Zspa
dc.date.available2020-12-16T22:38:34Zspa
dc.date.issued2020-12-15spa
dc.description.abstractThis thesis studied the mechanical, tribological and electrochemical properties of TiWSiN thin films. The thin films were deposited by reactive magnetron co-sputtering using equipment of two and three targets. Films were produced under four different conditions: i) by modifying the silicon content; ii) varying the nitrogen content; iii) applying the Taguchi method to find optimal deposition conditions; and iv) under the optimal conditions found, varying the silicon and nitrogen content. Comparative coatings of TiWSi, TiWN, TiSiN and WSiN were also deposited. The coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and nanoindentation. It was found that silicon and nitrogen have effects on the microstructure, chemical composition and morphology, which affect the mechanical, tribological and electrochemical properties of the thin films. Hardness of 26GPa was achieved, as well as low wear rates and low friction coefficients. However, the electrochemical properties did not show improved behavior in comparison with the substratespa
dc.description.abstractEn la presente investigación se estudiaron las propiedades mecánicas, tribológicas y electroquímicas de recubrimientos de TiWSiN. Los recubrimientos se depositaron por el proceso de co-sputtering reactivo utilizando equipos con una configuración de dos y tres blancos. Se fabricaron recubrimientos bajo cuatro condiciones diferentes: i) modificando el contenido de silicio; ii) variando el contenido de nitrógeno; iii) aplicando el método Taguchi para encontrar condiciones óptimas de depósito; y iv) utilizando las condiciones óptimas encontradas, variando el contenido de silicio y nitrógeno. También se depositaron recubrimientos comparativos de TiWSi, TiWN, TiSiN y WSiN. Los recubrimientos fueron caracterizados por las técnicas de difracción de rayos X (XRD), espectroscopía de fotoelectrones emitidos por rayos X (XPS), microscopía electrónica de barrido (SEM), microscopía de fuerza atómica (AFM) y nanoindentación. Se evidenció que el silicio y el nitrógeno tienen efectos importantes en la microestructura, composición química y morfología que inciden en las propiedades mecánicas, tribológicas y electroquímicas de los recubrimientos. Se lograron durezas de 26GPa, bajas tasas de desgaste y bajos coeficientes de fricción. Sin embargo, las propiedades electroquímicas no presentaron un comportamiento significativamente superior al del sustrato.spa
dc.description.additionalLínea de Investigación: Ingeniería de Superficies y Nanomaterialesspa
dc.description.degreelevelDoctoradospa
dc.description.sponsorshipMinciencias, Universidad Nacional de Colombia sede Bogotá, centro de investigación cooperativa en Biomateriales, CIC biomaGUNE, Universidad de San Buenaventura sede Bogotá, Universidad Militar Nueva Granada, centro de nanobiomédica de la Universidad Adam Mickiewicz.spa
dc.format.extent214spa
dc.format.mimetypeapplication/pdfspa
dc.identifier.urihttps://repositorio.unal.edu.co/handle/unal/78728
dc.language.isospaspa
dc.publisher.branchUniversidad Nacional de Colombia - Sede Bogotáspa
dc.publisher.programBogotá - Ingeniería - Doctorado en Ingeniería - Ciencia y Tecnología de Materialesspa
dc.relation.referencesJ. Musil, Physical and Mechanical Properties of Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering, in: A. Cavaleiro, J.T.M.D. Hosson (Eds.), Nanostructured Coat., Springer New York, 2006: pp. 407–463. http://link.springer.com.ezproxy.unal.edu.co/chapter/10.1007/978-0-387-48756-4_10 (accessed September 3, 2015)spa
dc.relation.referencesT.E. Twardowski, Introduction to Nanocomposite Materials: Properties, Processing, Characterization, DEStech Publications, Inc, 2007spa
dc.relation.referencesJ. Musil, P. Zeman, P. Baroch, 4.13 - Hard Nanocomposite Coatings, in: S.H.F.B.J.V.T. Yilbas (Ed.), Compr. Mater. Process., Elsevier, Oxford, 2014: pp. 325–353spa
dc.relation.referencesD.M. Mattox, Handbook of Physical Vapor Deposition (PVD) Processing, Segunda, Elsevier Inc, Oxford, UK., 2010spa
dc.relation.referencesJ.M. Albella, Láminas delgadas y recubrimientos: preparación, propiedades y aplicaciones, Editorial CSIC - CSIC Press, 2003spa
dc.relation.referencesD. Satas, A. Tracton, eds., Coatings Technology Handbook, Segunda, Marcel Dekker, New York, 2001. C:\Users\Hugo\Documents\Apuntes tesis\Libros Sputtering\Coatings Technology Handbook.pdfspa
dc.relation.referencesR.F. Bunshah, Handbook of hard coatings: deposition technologies, properties and applications, Noyes Publications ; William Andrew Pub., Park Ridge, N.J.; Norwich, N.Y., 2001spa
dc.relation.referencesM. Jaroš, J. Musil, R. Čerstvý, S. Haviar, Effect of energy on structure, microstructure and mechanical properties of hard Ti(Al,V)Nx films prepared by magnetron sputtering, Surf. Coat. Technol. (n.d.). https://doi.org/10.1016/j.surfcoat.2017.06.074spa
dc.relation.referencesJ.A. Thornton, The microstructure of sputter‐deposited coatings, J. Vac. Sci. Technol. A. 4 (1986) 3059–3065. https://doi.org/10.1116/1.573628spa
dc.relation.referencesH.O. Pierson, Handbook of Refractory Carbides & Nitrides: Properties, Characteristics, Processing and Apps., William Andrew, 1996spa
dc.relation.referencesJ.-L. Vallés, I. Vergara, Tribología con nanomateriales, Investig. Cienc. (2008) 48–57spa
dc.relation.referencesK. Holmberg, Friction science saves energy, VTT Impulse Mag. (2009) 18–25spa
dc.relation.referencesJ.C. Caicedo, L. Yate, J. Montes, Improving the physicochemical surface properties on AISI D3 steel coated with Ti-W-N, Surf. Coat. Technol. 205 (2011) 2947–2953. https://doi.org/10.1016/j.surfcoat.2010.11.005spa
dc.relation.referencesA.A. Voevodin, D.V. Shtansky, E.A. Levashov, J.J. Moore, eds., Nanostructured Thin Films and Nanodispersion Strengthened Coatings, Springer and Business Media Inc, Dordrecht, 2004. http://link.springer.com/10.1007/1-4020-2222-0 (accessed September 19, 2015).spa
dc.relation.referencesT.E. Twardowski, Introduction to Nanocomposite Materials: Properties, Processing, Characterization, DEStech Publications, Inc, 2007.spa
dc.relation.referencesF. Díaz, Introducción a los nanomateriales, (2012). http://olimpia.cuautitlan2.unam.mx/pagina_ingenieria/mecanica/mat/mat_mec/m6/Introduccion%20a%20los%20nanomateriales.pdf (accessed September 13, 2015).spa
dc.relation.referencesA.A. Voevodin, D.V. Shtansky, E.A. Levashov, J.J. Moore, Nanostructured Thin Films and Nanodispersion Strengthened Coatings, Springer Science & Business Media, 2006.spa
dc.relation.referencesA.S.H. Makhlouf, D. Scharnweber, Handbook of Nanoceramic and Nanocomposite Coatings and Materials, Butterworth-Heinemann, 2015.spa
dc.relation.referencesA.J. Detor, A.M. Hodge, E. Chason, Y. Wang, H. Xu, M. Conyers, A. Nikroo, A. Hamza, Stress and microstructure evolution in thick sputtered films, Acta Mater. 57 (2009) 2055–2065. https://doi.org/10.1016/j.actamat.2008.12.042spa
dc.relation.referencesS.T. Oyama, The chemistry of transition metal carbides and nitrides, Springer Science and Business Media Inc, 1996spa
dc.relation.referencesM. Donachie, Titanium: A Technical Guide, Segunda Edición, ASM international, USA, 2000spa
dc.relation.referencesS. Zhang, W. Zhu, TiN coating of tool steels: a review, J. Mater. Process. Technol. 39 (1993) 165–177. https://doi.org/10.1016/0924-0136(93)90016-Yspa
dc.relation.referencesE. Lassner, W.-D. Schubert, Tungsten, Properties, chemistry, technology of the elements, alloys, and chemical compounds, Kluwer Academic/Plenum Publishers, New York, 1999.spa
dc.relation.referencesC.L. Rollinson, The chemistry of chromium, molybdenum and tungsten, Pergamon Press, 1975spa
dc.relation.referencesW. Jeitschko, R. Pottgen, R.-D. Hoffmann, Structural Chemistry of Hard Materials, in: R. Riedel (Ed.), Handb. Ceram. Hard Mater., Wiley-VCH Verlag GmbH, 2000: pp. 2–40. http://onlinelibrary.wiley.com/doi/10.1002/9783527618217.ch1/summary (accessed September 21, 2015).spa
dc.relation.referencesM. Herrmann, H. Klemm, Chr. Schubert, Silicon Nitride Based Hard Materials, in: R. Riedel (Ed.), Handb. Ceram. Hard Mater., Wiley-VCH Verlag GmbH, 2000: pp. 749–801spa
dc.relation.referencesC. Yuangyai, H.B. Nembhard, Chapter 8 - Design of Experiments: A Key to Innovation in Nanotechnology, in: Emerg. Nanotechnologies Manuf., William Andrew Publishing, Boston, 2010: pp. 207–234. https://doi.org/10.1016/B978-0-8155-1583-8.00008-9spa
dc.relation.referencesM. Sivapragash, P. Kumaradhas, B. Stanly Jones Retnam, X. Felix Joseph, U.T.S. Pillai, Taguchi based genetic approach for optimizing the PVD process parameter for coating ZrN on AZ91D magnesium alloy, Mater. Des. 90 (2016) 713–722spa
dc.relation.referencesB. Wang, S. Wei, L. Guo, Y. Wang, Y. Liang, B. Xu, F. Pan, A. Tang, X. Chen, Effect of deposition parameters on properties of TiO2 films deposited by reactive magnetron sputtering, Ceram. Int. 43 (2017) 10991–10998. https://doi.org/10.1016/j.ceramint.2017.05.139spa
dc.relation.referencesD. Yu, C. Wang, X. Cheng, F. Zhang, Optimization of hybrid PVD process of TiAlN coatings by Taguchi method, Appl. Surf. Sci. 255 (2008) 1865–1869. https://doi.org/10.1016/j.apsusc.2008.06.204spa
dc.relation.referencesC. Montero-Ocampo, E.A. Ramírez-Ceja, J.A. Hidalgo-Badillo, Effect of codeposition parameters on the hardness and adhesion of TiVN coatings, Ceram. Int. 41 (2015) 11013–11023. https://doi.org/10.1016/j.ceramint.2015.05.046spa
dc.relation.referencesY.-W. Lin, H.-A. Chen, G.-P. Yu, J.-H. Huang, Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering, Thin Solid Films. 618, Part A (2016) 13–20. https://doi.org/10.1016/j.tsf.2016.05.021spa
dc.relation.referencesD.Y. Chen, C.H. Tsai, W.J. Yang, D.W. Liu, C.Y. Hsu, Reactive co-sputter deposition and properties of CrAlSiN hard films for enhancement of cutting tools, Int. J. Refract. Met. Hard Mater. 58 (2016) 110–116. https://doi.org/10.1016/j.ijrmhm.2016.04.006spa
dc.relation.referencesD. Yang, C. Liu, X. Liu, M. Qi, G. Lin, EIS diagnosis on the corrosion behavior of TiN coated NiTi surgical alloy, Curr. Appl. Phys. 5 (2005) 417–421. https://doi.org/10.1016/j.cap.2004.11.002spa
dc.relation.referencesM.E. Orazem, B. Tribollet, Electrochemical Impedance Spectroscopy, John Wiley & Sons, Ltd, 2008. https://doi.org/10.1002/9780470381588spa
dc.relation.referencesM. Danışman, The corrosion behavior of nanocrystalline nickel based thin films, Mater. Chem. Phys. 171 (2016) 276–280. https://doi.org/10.1016/j.matchemphys.2016.01.018spa
dc.relation.referencesA. Lasia, Electrochemical Impedance Spectroscopy and its Applications, Springer-Verlag, New York, 2014. https://doi.org/10.1007/978-1-4614-8933-7spa
dc.relation.referencesM. Weil, W.-D. Schubert, The Beautiful Colours of Tungsten Oxides, (2013). https://pdfs.semanticscholar.org/c477/efb0be273f9ab630401ca6f47e7514dc1dde.pdf?_ga=2.185929705.1562938630.1576561637-1261920055.1570291803spa
dc.rightsDerechos reservados - Universidad Nacional de Colombiaspa
dc.rights.accessrightsinfo:eu-repo/semantics/openAccessspa
dc.rights.licenseAtribución-NoComercial-SinDerivadas 4.0 Internacionalspa
dc.rights.spaAcceso abiertospa
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/spa
dc.subject.ddc540 - Química y ciencias afines::542 - Técnicas, procedimientos, aparatos, equipos, materialesspa
dc.subject.proposalCo-sputteringspa
dc.subject.proposalCo-sputteringeng
dc.subject.proposalRecubrimientos nanoestructuradosspa
dc.subject.proposalNanostructured thin filmseng
dc.subject.proposalTiWSiNspa
dc.subject.proposalTiWSiNeng
dc.subject.proposalHardness of thin filmseng
dc.subject.proposalPulverización catódicaspa
dc.subject.proposalNanodurezaspa
dc.subject.proposalWear of thin filmseng
dc.subject.proposalCorrosion of thin filmseng
dc.subject.proposalDesgaste recubrimientosspa
dc.subject.proposalCorrosión recubrimientosspa
dc.titleRecubrimientos nanoestructurados de Ti-W-Si-N depositados mediante la técnica de co-sputtering magnetrón reactivospa
dc.typeTrabajo de grado - Doctoradospa
dc.type.coarhttp://purl.org/coar/resource_type/c_db06spa
dc.type.coarversionhttp://purl.org/coar/version/c_ab4af688f83e57aaspa
dc.type.contentTextspa
dc.type.driverinfo:eu-repo/semantics/doctoralThesisspa
dc.type.versioninfo:eu-repo/semantics/acceptedVersionspa
oaire.accessrightshttp://purl.org/coar/access_right/c_abf2spa

Archivos

Bloque original

Mostrando 1 - 1 de 1
Cargando...
Miniatura
Nombre:
79828392.2020.pdf
Tamaño:
10.73 MB
Formato:
Adobe Portable Document Format

Bloque de licencias

Mostrando 1 - 1 de 1
Cargando...
Miniatura
Nombre:
license.txt
Tamaño:
3.8 KB
Formato:
Item-specific license agreed upon to submission
Descripción: